Thin-film deposition: chemical techniques

by Anna Łukowiak, Beata H. Borak
Reference:
Thin-film deposition: chemical techniques (Anna Łukowiak, Beata H. Borak), Chapter in Integrated Optics. Vol. 1, Modeling, material platforms and fabrication techniques (Giancarlo C. Righini, Maurizio Ferrari, eds.), The Institution of Engineering and Technology, volume 77, 2021.
Bibtex Entry:
@InCollection{	  000230954,
  author	= {Łukowiak, Anna and Borak, Beata H.},
  title		= {Thin-film deposition: chemical techniques },
  booktitle	= {Integrated Optics. Vol. 1, Modeling, material platforms and fabrication techniques},
  editor	= {C. Righini, Giancarlo and Maurizio Ferrari},
  address	= {London},
  publisher	= {The Institution of Engineering and Technology},
  pages		= {217-243},
  isbn		= {9781839533419},
  volume	= {77},
  series	= {IET Materials, Circuits and Devices Series},
  year		= {2021}
}